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futas 300mm Dry Cleaning System
ZIVIS(Integer) is a Plasma Cleaning System for 300mm wafer fabrication. The dry cleaning solution is implemented to overcome the disadvantages of using the wet cleaning process. The dry cleaning is becoming more critical in areas where semiconductor manufacturing technology is becoming more complex and nano processing. ZIVIS is designed to meet the semiconductor industry standards for cleaning process. The new plasma cleaning system also has a cassette loadlock that can hold up to 25 wafers and a dual pick-up/down robot for increased productivity.

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