SUPRA(Tigma) series is an Ashing System designed with a Low Damage Remote Microwave Plasma Source. The system provides improved throughput, consistency and high precision.The multi-source platform is...
DAS series is the latest generation 200mm Ashing and Etching System with increased productivity and it design with the smallest footprint for 200mm System. The system provided high quality ...
PROFILER is a new generation Multi-Application system that performs Pattern Profiling and Plasma Oxide Dry Cleaning (POC) utilizing a Point Inductively Coupled Plasma (PICP) source for semiconductor...
FUTAS is the future generation Ashing system with H2 gas based plasma source that utilizes high concentration (up to 100%) H2 process gas for optimized polymer removal capability. The new process is critical...
ZIVIS(Integer) is a Plasma Cleaning System for 300mm wafer fabrication. The dry cleaning solution is implemented to overcome the disadvantages of using the wet cleaning process.
Room no.B201, Musee Kojimachi, 4-9,Kojimachi 6-chome, Chiyoda-ku,Tokyo 1020083 Japan
T. +81 3-62569005
Room 233, Hiroshima Techno Plaza, 3-13-26 Kagamiyama, Higashi Hiroshima-shi, Hiroshima, 739-0046, Japan
T. +81 82-4266355
1006, E.YAGER LN Suite108 Austin TX 78753 USA
10-270 S. Cole Road, Building No. 1, Suite 30, Boise, ID, 83709 USA
1926, Unit1, Building No.4 of i-City, Yicuiyuan 2nd town, no.8 of Jinye 2nd Road, Gaoxin district, Xi'an City, Shaanxi Province, China.
T. +86 29-68740876
F23-07£¨Columbus Plaza,#282 Chang Jiang North Rd, New Disrict WUXI City
T. +86 510-85222744
21Chifeng Street, Dalian Economic and Technological Development zone, Dalian, Liaoning Province, 116600
T. +86 411-87905386
Room E907,TaiWan Incubation Center,88#Xiangxing Road,Xiamen Torch(Xiang'an)Industrial Zone,Xiamen P.C: 361115
T. +86 5927291768
5F.-2, No.25, Puding Rd., East Dist., Hsinchu City 300, Taiwan
T. +886 - 3 - 5670258
7F-3, No.146, Wenxing Rd., Guishan Town, Taoyuan County 33377, Taiwan
T. +886 - 3 - 3185800
2F-1, No. 139, SanMin St., Gang-Cian Village, HsinShih Township 74445, Tainan County, Taiwan
T. +886 - 6 - 5991370
2F.-6, No.220-5, Zhongshan Rd., Fengyuan Dist., Taichung City 420, Taiwan
T. +886 - 4 - 25294065
12 Tannery Road #07-01 HB Centre 1 Singapore 347722
T. +65 - 6742 - 6789
TFE(THIN FILM EQUIPMENT)
Italy Viale delle Scienze, 23 - 20082 Binasco (MI), Italy
445-170 )Seoku-dong, Hwaseong si, Gyeonggi-do, Korea
48, Samsung 1 ro 4-gil, Hwaseong-si, Gyeonggi-do, Korea .